| Device Size | 2*2mm ~ 130mm*130mm |
| Inspection Accuracy | 5-14um |
| Inspection Items | Ball, Pad, Substrate, Lid / Stiffener, Mark etc. |
| Metrology Items | XO, YO, DI, CO, BH, ST etc. |
| Loading/Unloading | Tray to Tray / Tray to Reel / Reel to Tray |
| Main Defect Types | Scratch, dent, void, chipping, crack, micro crack, pad/lead/ball
damage, pad/lead/ball burr, foreign material, incomplete fill, contamination, mark, etc. |
