| Water Size | 4"/6"/8" |
| Multiple Detection Channels | Phase detection channel, scattering light detection channel, phase detection channel, and photoluminescence signal. |
| Detection Applications | In LED, optoelectronics, telecommunications, automotive-grade and other compound semiconductor wafer substrates and epitaxy. |
| Detection Items | Surface and photoluminescence detection. |
| Stability | The yield difference of the same material is less than 0.1%. |
| Main Defect Types | Cracks, micropipe, pit, stain, step bunching, particle, slipline, scratch, etc. |
